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Pressure Control Ambient Capacitance Manometer Comparison Guide


KJLC® ACG
KJLC® Carbon XCG
MKS® AA01A
MKS® 622C
MKS® 626C
MKS® 722B
Measurement Method Capacitance Manometer Capacitance Manometer Capacitance Manometer Capacitance Manometer Capacitance Manometer Capacitance Manometer
Active / Passive Active Active Active Active Active Active
Full Scale Range 0.1 to 1000 10 to 1000 1 to 1000 1 to 1000 0.1 to 1000 1 to 25,000
Lowest Measurement 0.01% of Full Scale Value 0.05% of Full Scale Value 0.01% of Full Scale Value 0.01% of Full Scale Value 0.01% of Full Scale Value 0.01% of Full Scale Value
Temperature Compensation, °C Ambient Ambient Ambient Ambient Ambient Ambient
Warm-up Time, min N/A N/A N/A N/A N/A N/A
Accuracy (typical) 1000 Torr/1100 mbar to 1 torr F.S.: 0.2%
0.25 Torr F.S.: 0.25%
0.1 Torr/mbar F.S.: 0.5%
0.50% of reading
1% of reading
0.25% for 1 to 1000 Torr (0.15% optional)
0.50% for <1 Torr
0.25% of reading 0.25% for 1 to 1000 Torr
0.50% for < 1 Torr
0.50% of reading
Response Time ≥0.25 Torr / mbar: 30 ms 0.1 Torr / mbar: 130 ms 100 ms ≥ 1 Torr: < 20 ms
< 1 Torr: < 40 ms
< 20 ms < 20 ms
Units Torr
mbar
Torr
mbar
Torr
mbar
Torr
mbar
Torr
mbar
Torr
mbar
Temperature - Operating Range, °C (°F) 5 to 50 (10 to 122) 0 to 70 (32 to 158) 0 to 50 (32 to 122) 0 to 50 (32 to 122) 0 to 50 (32 to 122) 0 to 50 (32 to 122)
Temperature - Bakeout Max, °C (°F) ≤110 (230) ≤110 (230) ≤50 (122) ≤50 (122) ≤50 (122) ≤50 (122)
Diaphragm Composition Aluminum oxide ceramic (Al2O3) Aluminum Oxide Ceramic (AI2O3) Inconel® Nickel Alloys
Incoloy®Â Nickel Alloys
Inconel® Nickel Alloys
Incoloy®Â Nickel Alloys
Inconel® Nickel Alloys
Incoloy®Â Nickel Alloys
Inconel® Nickel Alloys
Incoloy®Â Nickel Alloys
Set-Point Relays Controller Dependent Controller Dependent 2 Controller Dependent Controller Dependent Controller Dependent
Analog Output 0 to 10 VDC 0 to 10 VDC 0 to 10 VDC 0 to 10 VDC 0 to 10 VDC 0 to 5 VDC
0 to 10 VDC
Recommended Mounting Orientation Any, except for upside down Any, except for upside down Any, except for upside down Any, except for upside down Any, except for upside down Any, except for upside down
Input Power +14 to +30 V (DC), ≤ 1 W +13 to +30 VDC 15 VDC to 30 VDC @ 35 mA ±15VDC (±5%) @ 35 mA ±15VDC (±5%) @ 35 mA 0 to 10 Volt output, 13 VDC to 32 VDC @ 10 mA max
0 to 5 Volt output, 10.8 VDC to 32 VDC @ 10 mA max
(regulated if below 13 VDC)
Connector 15 Pin Sub D Male 9 Pin Sub D Male
FCC68, 8 Pin
Binder M12, 8 Pin Male
15 Pin Sub D Male Terminal Block 15 Pin Sub D Male 9 Pin Sub D
15 Pin Sub D
15 Pin Sub D High Density
4 Pin Bayonet
5 Pin Terminal Strip
Compliance and Standards CE
RoHS
UL
CSA
EN
SEMI
CE
RoHS
CE
RoHS
CE
RoHS
CE
RoHS
CE
RoHS
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