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Pressure Control Heated Capacitance Manometer Comparison Guide


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KJLC® HCG
MKS® AA02A
MKS® 627F
MKS® 628F
Measurement Method Capacitance Manometer Capacitance Manometer Capacitance Manometer Capacitance Manometer
Active / Passive Active Active Active Active
Full Scale Range 0.05 to 1000 0.1 to 1000 0.02 to 25,000 0.05 to 25,000
Lowest Measurement 0.01% of Full Scale Value 0.01% of Full Scale Value 0.01% of Full Scale Value 0.01% of Full Scale Value
Temperature Compensation, °C 45
100
45
80
100
45 100
Warm-up Time, min >30 2 hours for 1 to 1000 Torr models
3 hours for <1 Torr models
2 hours > 1 Torr units
4 hours < 1 Torr units
1 hour for 1000 Torr models
4 hours for 0.1 Torr models
Accuracy (typical) 0.15% of reading 0.10% Reading (1 to 1000 Torr)
0.12% Reading (< 1 Torr)
0.12% of Reading
0.15% (0.25, 0.1, and 0.05 Torr versions)
0.25% of reading (1 to 1000 Torr)
0.50% of reading (0.25, 0.1, and 0.05 Torr versions)
Units Torr
mbar
Torr
mbar
Torr
mbar
Torr
mbar
Temperature - Operating Range, °C (°F) 10 to 40 (50 to 105) 15 to 40 (59 to 104) 15 to 40 (59 to 104) 15 to 50 (59 to 122)
Temperature - Bakeout Max, °C (°F) ≤110 (230) ≤50 (122) ≤50 (122) ≤65 (149)
Diaphragm Composition Aluminum oxide ceramic (Al2O3) Inconel® Nickel Alloys Incoloy® Nickel Alloys Inconel® Nickel Alloys Incoloy® Nickel Alloys Inconel® Nickel Alloys Incoloy® Nickel Alloys
Set-Point Relays 2 2 Controller Dependent Controller Dependent
Analog Output 0 to 10 VDC 0 to 10 VDC 0 to 10 VDC 0 to 10 VDC
Recommended Mounting Orientation Any, except for upside down Any, except for upside down Any, except for upside down Any, except for upside down
Input Power +14 to +30 VDC or ±15 V (±5%)
≤ 12 W during heat up
≤ 8 W at operating temperature
±15 VDC (±5%) @ 0.40 amps (max)
+24 VDC ±10% @ 11 watts (max)
±15VDC (±5%) @ 35 mA ±15VDC (±5%) @ 35 mA
Connector 15 Pin Sub D Male 15 Pin Sub D Male 15 Pin Sub D Male 15 Pin Sub D Male
Compliance and Standards CE
RoHS
UL
CSA
EN
SEMI
CE
RoHS
CE
RoHS
CE
RoHS
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