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EBT70FRAB

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Specifications

Manufacturer EBARA
Model EBT70
Pumping Speeds
N2: 75.0 L/s
H2: 45.0 L/s
Max Gas Throughput Ar: 5.00 mbar*L/s
N2: 10.0 mbar*L/s
Ultimate Pressure
ISO-K Flange
1.00 x 10-8 mbar
7.50 x 10-9 Torr
Max Foreline Pressure 1.20 x 100 mbar
9.00 x 10-1 Torr
Cooling Method(s) Method
Forced Air
Water
Foreline Flange KF16
Inlet Flange ISO63-K
Compression Ratio(s) N2: 1.00 x 107
H2: 1.00 x 104
Weight Lbs 11.0
Weight kg 5.00
Lubrication Type Dry
Vacuum Range High Vacuum (10-4 - 10-8 Torr)
Technology Type Turbomolecular

Accessories Table

Description Accessory Type Part Number Price In Stock Add To Cart Combine Tooltip How to Combine - Click the checkboxes of the parts you would like to purchase and then click the button below to add all parts selected into your Cart.
Description Accessory Type Part Number Price In Stock Add To Cart Combine Tooltip How to Combine - Click the checkboxes of the parts you would like to purchase and then click the button below to add all parts selected into your Cart.
Bolting Kit, For DN63CF (4.50" OD) Flange, Including Bolt, Nut, and Washer Set and Copper Gasket
Hardware
DN63CF-HDKIT
$80.40
Contact KJLC for Availability Add Item
Clamping Kit, For QF16 Flange, Including Aluminum Clamp and FKM Centering Ring
Hardware
QF16-HDKIT
$15.45
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Clamping Kit, For QF63 (ISO63-K) Flange, Including (4) Cold Steel Zinc Plated) Clamp and FKM Centering Ring
Hardware
QF63K-HDKIT
$177.85
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Communication cable between Ebara EBT turbo and ETC76 controller, 5m.
EBTCBL01M05M
$490.00
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Controller, Ebara, for EBT70
Turbo Accessory
ETC76
$1,350.00
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Ebara controller, for EBT70 Turbo Pumps
Turbo Accessory
ETC76
$1,350.00
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Ebara fan cable for controller ETC76/ETC246, 3m
EBTCBL01F03M
P.O.R.
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Ebara fan cable for controller ETC76/ETC246, 5m
EBTCBL01F05M
P.O.R.
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Ebara motor cable for controller ETC76/ETC246, 3m
EBTCBL01M03M
P.O.R.
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Ebara motor cable for controller ETC76/ETC246, 5m
EBTCBL01M05M
$490.00
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Fan cable between Ebara EBT turbo and ETC76 controller, 5m.
EBTCBL01F05M
P.O.R.
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Mains Cable with Flying Leads for single phase pumps, 3m length
Mains Cable
70010020305
P.O.R.
In Stock
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Mains Cable with NEMA 5-15 (N.A. / Japan) Plug for single phase, 3m length
Mains Cable
86221580
P.O.R.
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Mains Cable with NEMA 6-15 (N.A. / Japan) Plug for single phase, 3m length
Mains Cable
86610100
P.O.R.
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No items have been selected Include Main Part:  EBT70FRAB
How to Combine Click the checkboxes of the parts you would like to purchase and then click the button below to add all parts selected into your Cart.
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