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Pressure Control Mass Flow Controller Comparison Guide


MKS® 1179C
MKS® GE50A
MKS® GM50A
MKS® GV50A
MKS® GM100A
MKS® GE250A
MFC Type Thermal Thermal Thermal Thermal Thermal Thermal
Full Scale Flow Range, sccm 10 to 20,000 5 to 50,000 5 to 50,000 5 to 50,000 50,000 to 100,000 250,000
Maximum Inlet Pressure, psid 150 150 150 150 150 150
Normal Operating Pressure Differential, psid 10 to 5000 sccm; 10 to 40
10000 to 30000 sccm; 15 to 40
10 to 5000 sccm; 10 to 40
10000 to 20000 sccm; 15 to 40
30000 to 50000 sccm; 25 to 40
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
10 to 5000 sccm; 10 to 40
10000 to 20000 sccm; 15 to 40
30000 to 50000 sccm; 25 to 40
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
10 to 5000 sccm; 10 to 40
10000 to 20000 sccm; 15 to 40
30000 to 50000 sccm; 25 to 40
(N2 Full Scale)
(with atmospheric pressure at the MFC outlet)
50,000 - 100,000 sccm; 40 to 80
(N2 Full Scale with atmospheric pressure at the MFC outlet)
30 to 55 (dependent on fitting type) (with atmospheric pressure at the MFC outlet)
Seal Type Elastomer Elastomer Metal Elastomer Metal Elastomer
Integrated Software No Yes Yes Yes Yes Yes
Accuracy (typical) ±1% of Full Scale ±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
±1% of set point for 20 to 100% Full Scale
±0.2% of Full Scale for 2 to 20% Full Scale
±1% of set point for 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale ±1% of set point for 20 to 100% Full Scale ±0.2% of Full Scale for 2 to 20% Full Scale ±1% of set point for > 20% to 100% Full Scale ±0.25% of Full Scale for 5% to 20% Full Scale
Repeatability ±0.2% of Full Scale ±0.3% of Full Scale ±0.3% of Full Scale ±0.3% of Full Scale ±0.3% of Full Scale ±0.5% of Full Scale
Resolution 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale 0.1% of Full Scale
Control Range 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.) 2% to 100% of Full Scale (range on mech.)
Warm-Up time <2 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) <30 minutes (to within 0.2% of Full Scale of steady state performance) >60 minutes
Typical Setting Time, sec <0.8 seconds (to within 2% of set point) <0.750, typical above 5% Full Scale <0.750, typical above 5% Full Scale <0.750, typical above 5% Full Scale <0.750, typical above 5% Full Scale 1 to 2 seconds typical above 10% Full Scale @ 50 psi
Temperature - Operating Range, °C (°F) 10 to 50 (50 to 122) 10 to 50 10 to 50 10 to 50 10 to 50 10 to 50
Analog Output 0 to 5 VDC into >10K Ω 0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
0 to 5 VDC (9 Pin Sub D Male and 15 Pin Sub D Male)
4 to 20 mA (15 Pin Sub D Male)
Input Power Max. current at start-up (first 2 sec): ±15 VDC (±5%) @ 200 mA
Typical current at steady state: ±15 VDC (±5%) @ 100 mA
+15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts) +15 to +24 VDC @ (<4 watts)
Communications, Standard Analog Analog Analog Analog Analog Analog
Communications, Optional N/A RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
RS485 (optional)
EtherCat (optional)
DeviceNet (optional)
Profibus (optional)
Profinet (optional)
Compliance and Standards CE CE CE CE CE CE
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